Anti-reflective coatings
Anti-reflective coatings are used in the lithography process to improve the photoresist profile and reduce the line width variation caused by scattering and reflecting light.
BARCs
BARCs are spin-on organic polymer formulations. These products are designed for specific lithographic wavelength processes including i-Line, 248nm, 193nm and 193nm immersion. They are coated on the wafer before the photoresist and must be performance-compatible with the photoresist.
TARCs
TARCs are water soluble polymers applied as a layer above the photoresist to reduce reflection of light during exposure, resulting in improved line width control. They can also be used as a protective coating to reduce photoresist poisoning/outgassing/defects.
BARCs
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Specifically-designed refractive indices for exposure system
ensures minimum reflectivity and maximum swing suppression
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Formulated in photoresist-compatible solvent systems
improved process windows, excellent coating uniformity, simplified EBR
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Broad spectrum of available polymer components
optimised performance including etch selectivity, via filling properties, minimal outgassing
TARCs
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Broadly-applicable material platform
suitable for all exposure wavelengths and nearly all photoresists
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Unique polymer
provides only PFOx/telomer-free formulation to meet regulatory requirements
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Water-based formulation
removed during standard photoresist develop step
BARC | Detail |
|---|
| BARLi ® |
BARCs for use with i-Line photoresists |
| HERB (TM) |
high etch rate BARCs for use with i-Line photoresists |
| KrF-series |
DUV BARCs for use with 248nm photoresists |
| ArF-series |
193nm BARCs for use with "dry" and immersion photoresists |
| EB-series |
193nm BARCs for use with "dry" and immersion photoresists |
TARCs | Detail |
|---|
| Aquatar ® series |
TARCs for use in i-Line, 248nm and 193nm lithography processes |
Anti-reflective coatings are used by the IC industry to manufacture many types of devices, including:
- Flash memory
- Discrete and power
- DRAM
- CCD image sensors
- Microprocessors
- Hard disc drives
Advise on safety handling:
Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.
Storage conditions
- Keep away from heat and flame.
- Avoid breathing vapors and contact with skin, eyes, and clothing.
- Use only with adequate ventilation and proper protective eyewear, gloves, and clothing.
- Wash thoroughly after handling.
- Keep container closed.
- Transport and store under dry conditions tightly closed.
- May liberate combustible solvent vapors.
- Store under cool and dry conditions. See label for details.
- Store in original container.
BARCS
Keep sealed in original container. Store between 41 - 77ºF (5 - 25ºC). Empty container may contain harmful residue.
TARCs
Keep sealed in original container. Avoid freezing and direct sunlight. Product should be stored > 32 F (0ºC). Empty container may contain harmful residue.
Shelf life
BARC products typically have at least a six-month shelf life under recommended storage conditions.
TARC products typically have a shelf life of 12 months under recommended storage conditions.
Package types
Available in gallon bottle, and 4-Liter and 10-Liter "bag-in-bottle" type