Spin-on Dielectrics or AZ® Spinfil® SOD Series is a Poly (perhydrosilazane) - (SiH2NH) based inorganic SOD material designed by AZ Electronic Materials to be used for gapfilling and in planarization applications in advanced device manufacturing. AZ® Spinfil® SOD Series can be converted to SiO2 based film which has similar properties to high performance CVD.
AZ® Spinfil® SOD Series is the industry-standard material and is used as the dielectric technology for FEOL gapfilling applications in advanced device manufacturing.
- Excellent Cost of Ownership with extremely high output
- No limitation confirmed down to 10nm gap
- Inorganic polymer based – purest silica
Product |
Detail |
| Spinfil 100 |
partially organic group modified silazane polymer based product with catalyst to enable low temperature SiO2 conversion, suggested applications are IMD, Sacrificial layer. |
| Spinfil 200 |
partially organic group modified silazane polymer based product without any catalyst, suggested applications are PMD, IMD.
|
| Spinfil 400 |
complete inorganic silazane polymer based product without any catalyst, suggested applications are STI, PMD
|
| Spinfil 600 |
complete inorganic silazane polymer based product without any catalyst, modified from Spinfil 400 for improved coating defectivity, suggested applications are STI, PMD |
AZ's SOD EBRs are used by a number of industries to manufacture many types of devices, including:
- Flash memory
- DRAM
- Logic such as microprocessors
Advise on safety handling:
Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.
Storage conditions
Requires special handling for waste; please ask your AZ Account Manager for more handling and storage information.
Shelf life
Typically 6 months shelf life (0~10 °C storage conditions)
Package types
Available in quart and 2.4-liter glass bottles